Dome-like and dense SiC-SiO2 nanocomposite films synthesized by laser chemical vapor deposition using CO2 laser
发布时间：2021-07-16
点击次数：
DOI码：10.1016/j.surfcoat.2010.10.050
所属单位：中南大学
发表刊物：Surface & Coatings Technology
关键字：SiC，SiO2，Nanocomposite，Laser CVD
摘要：SIC-SiO2 nanocomposite films were prepared by laser chemical vapor deposition (LCVD) using a CO2 laser; tetraethyl orthosilicate and acetylene were used as precursors. An amorphous phase was formed at a deposition temperature below 1650K, whereas a SiC (3 C) crystalline phase was co-deposited with amorphous SiO2 at a deposition temperature above 1650 K. Dome-like deposits were observed when low total pressure and high temperature were applied. At higher total pressure and lower temperature, the SiC-SiO2 nanocomposite film was obtained, with SiC grains about 10 nm in diameter distributed in amorphous SiO2. The highest deposition rate was 374 mu m h(-1) at 1675 K and 400 Pa
论文类型：期刊论文
学科门类：工学
一级学科：材料科学与工程
文献类型：J
卷号：205
期号：8-9
页面范围：2818-2822
是否译文：否
发表时间：2011-01-25
收录刊物：SCI