Model of curing shrinkage and kinetic parameters of an acrylate-based ultraviolet-embossing resist based on free volume theory

Release time:2016-07-15

Journal:Journal of Micro/Nanolithography, MEMS, and MOEMS

Note:https://doi.org/10.1117/1.JMM.12.2.023005

Co-author:Dou Zhang, Peng Jin, Graham Davies, Jie Lin, Jingbei Liu, Nan Liu*

Document Type:J

Volume:2

Issue:12

Page Number:023005-1-023005-5

Translation or Not:no

Date of Publication:2013-04-18