Microfabrication of Three-Dimensional, Free-Standing Ceramic MEMS Components by Soft Moulding
发布时间:2017-07-11
点击次数:
发表刊物:Advanced Engineering Materials
备注:https://doi.org/10.1002/adem.200300518
合写作者:Tim W. Button(*), Bo Su, Dou Zhang
文献类型:J
卷号:5
期号:12
页面范围:924-927
是否译文:否
发表时间:2003-07-11