Model of curing shrinkage and kinetic parameters of an acrylate-based ultraviolet-embossing resist based on free volume theory
发布时间:2016-07-15
点击次数:
发表刊物:Journal of Micro/Nanolithography, MEMS, and MOEMS
备注:https://doi.org/10.1117/1.JMM.12.2.023005
合写作者:Dou Zhang, Peng Jin, Graham Davies, Jie Lin, Jingbei Liu, Nan Liu*
文献类型:J
卷号:2
期号:12
页面范围:023005-1-023005-5
是否译文:否
发表时间:2013-04-18