Affilication of Author(s):中南大学

School Sign:中南大学

Patent Applicant:郑煜

Disigner of the Invention:郑煜

Patent description:201610470566.X

Note:2016-12-28 实质审查的生效 IPC(主分类):B24B 49/04申请日:20160624 2016-11-30 公开

Type of Patent:Invent

State of Patent:Pending patent

Application Number:201610470566

Service Invention or Not:no

First Author:郑煜

Pre One:基于平板波导共振耦合的光传感器、调制器及其制作方法 Next One:一种光波导晶圆表面检测装置