Impact Factor:3.8
DOI number:10.1016/j.vacuum.2023.112952
Journal:Vacuum
Co-author:Chun Hu
First Author:Jie Zhang
Indexed by:Journal paper
Correspondence Author:Li Chen, Yi Kong
Discipline:Engineering
First-Level Discipline:Materials Science and Engineering
Document Type:J
Volume:221
Page Number:112952
Translation or Not:no
Included Journals:SCI