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分子泵减振系统设计研究

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  • Release time:2023-11-15

  • Leading Scientist:chenzhi

  • Status:已结题

  • Type of Research Outcome:2022/09-2023/09

  • Nature of Project:企业横向课题

  • Project Participants:主持

  • Project Number:S22H1201

  • Project Approval Number:8.5万元

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