炭/炭复合材料化学气相沉积工艺进展
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Release time:2021-07-17 Affiliation of Author(s):中南大学 Journal:粉末冶金材料科学与工程 Key Words:炭/炭复合材料;化学气相沉积（CVD）;工艺 Abstract:对多种化学气相沉积工艺进行了分析对比,指出在炭/炭复合材料的研制与开发中,以等温等压（ICVD）的工艺为最优。该工艺能很好地控制工艺参数,特别是对于装了大量异形件的高炉膛,所沉积的样件不仅密度均匀而且性能稳定,虽然其工艺周期较长,但在实际生产中,可以通过多料柱的高炉膛来降低成本,是比较成熟、稳定的生产工艺。近年来兴起的其他工艺,主要关注沉积速度和沉积机理,大多局限于实验室研究,距工业化大生产还有很大的距离 Indexed by:Journal paper Discipline:Engineering First-Level Discipline:Materials Science and Engineering Document Type:J Volume:11 Issue:5 Page Number:262-267 Translation or Not:no Date of Publication:2006-10-17 Included Journals:EI -
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