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Preparation of ceramic microlectromechanical systems (MEMS) using a gelcasting consolidation technique

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  • Release time:2017-07-11

  • Journal:Journal of Electroceramics

  • Co-author:F.J. Alves, T.W. Button, D. Zhang, L. Garcia-Gancedo, S.M. Olhero(*)

  • Document Type:J

  • Issue:9

  • Page Number:1-6

  • Translation or Not:no

  • Date of Publication:2008-02-11

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