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Microfabrication of Three-Dimensional, Free-Standing Ceramic MEMS Components by Soft Moulding

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  • Release time:2017-07-11

  • Journal:Advanced Engineering Materials

  • Note:https://doi.org/10.1002/adem.200300518

  • Co-author:Tim W. Button(*), Bo Su, Dou Zhang

  • Document Type:J

  • Volume:5

  • Issue:12

  • Page Number:924-927

  • Translation or Not:no

  • Date of Publication:2003-07-11

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