Effect of sputtered Mo interlayers on Si (100) substrates for the deposition of diamond film by hot filament chemical vapor deposition

Release time:2016-07-15

Journal:Surface and Coatings Technology

Note:https://doi.org/10.1016/j.surfcoat.2013.06.002

Co-author:Z.M. Yu*, Zhou Li, D. Zhang, Jie Li, P. Zheng, Li Ma, K.C. Zhou, Taimin Yang, Qiuping Wei

Document Type:J

Volume:232

Page Number:456-463

Translation or Not:no

Date of Publication:2013-03-21