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Optimization of CVD SiC process and preparation of high-purity coatings based on a thermodynamic–fluid dynamics coupled model

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  • Release time:2026-08-05

  • Journal:J. Cent. South Univ

  • Indexed by:Journal paper

  • Translation or Not:no

  • Date of Publication:2025-11-13

  • Included Journals:SCI

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