Multispectral imaging systems mostly adopt the coupling method of detectors and traditional spectroscopic elements, which has large mass and volume and insufficient customization ability. In view of the rapid development of low light level electromechanical systems and the increasing market demand for the miniaturization, lightweight and intellectualization of multispectral imaging detection, the current research work is mainly focused on breaking through the key technologies of multispectral imaging sensor microsystems based on static mosaic and dynamic tunable filter structures to develop micro mosaic in the visible near infrared band Aiming at three kinds of multispectral imaging sensors, including tunable micro piezoelectric and tunable micro opto electromechanical sensors, the research on the preparation of narrow-band filter film system, the pixelation of periodic multilayer fractal etching, the release of large aperture Fabry Perot cavity, the piezoelectric control of capacitor closed-loop feedback, the electrostatic actuation control of folded series feedback capacitor, high-precision micro nano optical assembly, multispectral data cube processing and target recognition is carried out.

Through the research of micro multispectral imaging devices, it is expected to form a new multispectral detection technology system, that is, dynamically tunable intelligent programmable multispectral detection technology, which will help to form a universal, micro, intelligent, adaptive, anti-interference multispectral detection capability. Through the wireless connection between the sensor module and the mobile device, the non-invasive analysis of the spectral information of the object is carried out by using the mobile multispectral device that can be mass produced, combined with the development of a wide range of application algorithms and cloud based solutions, which makes it possible to find new and extensive spectral sensing applications, and lays the foundation for spectral technology to move from high-end laboratory applications to mass consumption applications. The weight and size of the micro multispectral imaging sensor are significantly reduced, and the cost is significantly reduced. It is convenient for secondary development, and has the ability of intelligent tuning and anti-interference. It is very suitable for mobile and cloud based applications. It will also promote the combat effectiveness of weapons and equipment, leap forward the strike ability, or become the driving force for the change of equipment form and tactical change.