Pixel-based multichannel optical narrow band filter array
发布时间：2023-09-14点击次数：
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DOI码：10.1117/12.2579977
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发表刊物：Proc. SPIE
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关键字：Microfilter array; Fabry-Perot; Semiconductor technology
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摘要：A micro filter array for portable spectrometer was fabricated. Based on the Fabry Perot periodic multilayer dielectric film, a narrow band filter with a central wavelength of 589 nm was designed and fabricated. The bandwidth is about 3.2 nm, the transmittance is more than 60%, and the cutoff is OD3. The mask is designed based on the selected mobile camera, and the pixel of narrow-band filter is realized by using semiconductor technology such as step lithography and reactive ion etching on the optical film. The optical fiber spectrometer and atomic force microscope (AFM) were used to measure the micro area of the filter array. The results show that the adjustment of the Fabry Perot cavity is accurate and effective. A 4 x 4 filter periodic structure is realized. The filter array with unit size of 3 um x 3 um and size of 1280 x 720 is fabricated.
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备注：Journal: AOPC 2020: OPTICAL SENSING AND IMAGING TECHNOLOGY
Volume: 11567
DOI: 10.1117/12.2579977
Book Series: Proceedings of SPIE
Article Number: 115672P
Document Type: Proceedings Paper
Meeting: Applied Optics and Photonics China (AOPC) Conference - Optical Sensing and Imaging Technology
Location: Xiamen, PEOPLES R CHINA
Date: AUG 25-27, 2020
Published: 2020
Indexed: 2021-06-01
ISSN: 0277-786X
eISSN: 1996-756X
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合写作者：Yong Cai, Ziling Chen, Xiaoli Xie, Shengli Chang, Jingyue Fang
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第一作者：Huan Zhang
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论文类型：论文集
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论文编号：115672P
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学科门类：理学
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一级学科：物理学
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文献类型：C
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卷号：11567
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ISSN号：0277-786X
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是否译文：否
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发表时间：2021-06-01
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收录刊物：SCI
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方靖岳
个人信息
硕士生导师- 教师拼音名称：fangjingyue
- 电子邮箱：
- 入职时间：2021-12-30
- 所在单位：电子信息学院
- 学历：博士研究生毕业
- 性别：男
- 学位：理学博士学位
- 在职信息：在职
- 毕业院校：国防科技大学
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