Fabrication of spectral differential four channel microfiltration array
发布时间：2023-09-14点击次数：
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DOI码：10.1117/12.2586298
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发表刊物：Proc. SPIE
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关键字：Microfilter array; Fabry-Perot; Spectral difference; Background elimination
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摘要：A microfilter array based on the principle of spectral difference is prepared to improve the signal-to-noise ratio by eliminating the background. Based on the design of Fabry-Perot periodic multilayer medium film, the narrow-band filter with the central wavelength of 589nm, the bandwidth is about 3.2nm, the transmittance is 60%, and cutoff OD3 was prepared. A filter array with unit size of 11 mu m x 11 mu m and size of 2048x2048 was prepared by pixelating the optical narrow-band interference film by ultraviolet lithography and reactive ion etching. The microregion of filter array is measured by fiber optic spectrometer and atomic force microscope. The results show that the filter array is accurate and effective for the regulation of Fabry-Perot cavity, and the filter periodic structure of 2x2 is realized.
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备注：Journal: SEVENTH SYMPOSIUM ON NOVEL PHOTOELECTRONIC DETECTION TECHNOLOGY AND APPLICATIONS
Volume: 11763
DOI: 10.1117/12.2586298
Book Series: Proceedings of SPIE
Article Number: 117631Q
Published: 2021
Indexed: 2021-07-25
Document Type: Proceedings Paper
Meeting: 7th Symposium on Novel Photoelectronic Detection Technology and Applications
Location: Kunming, PEOPLES R CHINA
Date: NOV 05-07, 2020
ISSN: 0277-786X
eISSN: 1996-756X
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合写作者：Huan Zhang, Xiaoli Xie, Shengli Chang, Jingyue Fang
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第一作者：Guangyi Xiao
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论文类型：论文集
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论文编号：117631Q
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学科门类：工学
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一级学科：电子科学与技术
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文献类型：C
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卷号：11763
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ISSN号：0277-786X
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是否译文：否
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发表时间：2021-07-25
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收录刊物：SCI
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方靖岳
个人信息
硕士生导师- 教师拼音名称：fangjingyue
- 电子邮箱：
- 入职时间：2021-12-30
- 所在单位：电子信息学院
- 学历：博士研究生毕业
- 性别：男
- 学位：理学博士学位
- 在职信息：在职
- 毕业院校：国防科技大学
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