Analytical closed-form solutions for size-dependent static pull-in behavior in electrostatic micro-actuators via Fredholm integral equation
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Release time:2018-07-11
Journal:Sens. Actuat. A: Physical
Co-author:X.F. Li., S. Hosseini-Hashemi, A.S. Milani, R.J. Seethaler, H. Rokni
Page Number:190: 32–43, 2013
Translation or Not:no
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Email:338f4584ab192c4616a35e88511d47a3e4132b9f324ddb126ba5f3465ce96f1aee8829c8f7259422ddadf9bac43f7c734de052077491bce48709751c039e1d8ac0e0a115139548d3b13ae9546257dc084ab8042d708280a97e81339a3751a75433bde3cea06896de3a672780645d0e0ac78c949e2ee8d5d64749c1c7e2bf8ddf
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