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[21]岳建岭, 黄峰, 朱萍, 李淼磊, 王恩青.沉积温度对磁控溅射制备V-Al-Si-N硬质涂层结构及性能的影响[J].真空科学与技术学报, 2015, 35 (8) : 1005-1010.
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