Affilication of Author(s):中南大学
School Sign:中南大学
Patent Applicant:中南大学
Disigner of the Invention:郑煜
Note:2016-08-17 实质审查的生效IPC(主分类):H01L 21/66申请日:20160527 2016-07-20 公开
Type of Patent:Invent
State of Patent:Authorized patents
Application Number:201610365081.4
Authorization number:ZL201610365081.4
Service Invention or Not:no
First Author:郑煜