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Fundamental Research on Wafer-Level 3D Integration for 20/14nm ICs

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  • Release time:2016-04-28

  • Affiliation of Participant(s):Central South University

  • Leading Scientist:朱文辉

  • Supported by:Ministry of Science and Technology of the People's Republic of China

  • Type of Research Outcome:Theoretical research results

  • Type of Project:国家重点基础研究发展计划（973计划）

  • Nature of Project:Fundamental research

  • Project Number:2015CB057200

  • Date of Project Approval:2015-01-01

  • Scheduled completion time:2019-08-31

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    • Attachments:

  • 科技部关于国家重点基础研究发展计划2015年项目立项的通知.pdf   
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