Pixel-based multichannel optical narrow band filter array

Release time:2023-09-14

DOI number:10.1117/12.2579977

Journal:Proc. SPIE

Key Words:Microfilter array; Fabry-Perot; Semiconductor technology

Abstract:A micro filter array for portable spectrometer was fabricated. Based on the Fabry Perot periodic multilayer dielectric film, a narrow band filter with a central wavelength of 589 nm was designed and fabricated. The bandwidth is about 3.2 nm, the transmittance is more than 60%, and the cutoff is OD3. The mask is designed based on the selected mobile camera, and the pixel of narrow-band filter is realized by using semiconductor technology such as step lithography and reactive ion etching on the optical film. The optical fiber spectrometer and atomic force microscope (AFM) were used to measure the micro area of the filter array. The results show that the adjustment of the Fabry Perot cavity is accurate and effective. A 4 x 4 filter periodic structure is realized. The filter array with unit size of 3 um x 3 um and size of 1280 x 720 is fabricated.

Note:Journal: AOPC 2020: OPTICAL SENSING AND IMAGING TECHNOLOGY Volume: 11567 DOI: 10.1117/12.2579977 Book Series: Proceedings of SPIE Article Number: 115672P Document Type: Proceedings Paper Meeting: Applied Optics and Photonics China (AOPC) Conference - Optical Sensing and Imaging Technology Location: Xiamen, PEOPLES R CHINA Date: AUG 25-27, 2020 Published: 2020 Indexed: 2021-06-01 ISSN: 0277-786X eISSN: 1996-756X

Co-author:Yong Cai, Ziling Chen, Xiaoli Xie, Shengli Chang, Jingyue Fang

First Author:Huan Zhang

Indexed by:Essay collection

Document Code:115672P

Discipline:Natural Science

First-Level Discipline:Physics

Document Type:C

Volume:11567

ISSN No.:0277-786X

Translation or Not:no

Date of Publication:2021-06-01

Included Journals:SCI