Fabrication of spectral differential four channel microfiltration array

Release time:2023-09-14

DOI number:10.1117/12.2586298

Journal:Proc. SPIE

Key Words:Microfilter array; Fabry-Perot; Spectral difference; Background elimination

Abstract:A microfilter array based on the principle of spectral difference is prepared to improve the signal-to-noise ratio by eliminating the background. Based on the design of Fabry-Perot periodic multilayer medium film, the narrow-band filter with the central wavelength of 589nm, the bandwidth is about 3.2nm, the transmittance is 60%, and cutoff OD3 was prepared. A filter array with unit size of 11 mu m x 11 mu m and size of 2048x2048 was prepared by pixelating the optical narrow-band interference film by ultraviolet lithography and reactive ion etching. The microregion of filter array is measured by fiber optic spectrometer and atomic force microscope. The results show that the filter array is accurate and effective for the regulation of Fabry-Perot cavity, and the filter periodic structure of 2x2 is realized.

Note:Journal: SEVENTH SYMPOSIUM ON NOVEL PHOTOELECTRONIC DETECTION TECHNOLOGY AND APPLICATIONS Volume: 11763 DOI: 10.1117/12.2586298 Book Series: Proceedings of SPIE Article Number: 117631Q Published: 2021 Indexed: 2021-07-25 Document Type: Proceedings Paper Meeting: 7th Symposium on Novel Photoelectronic Detection Technology and Applications Location: Kunming, PEOPLES R CHINA Date: NOV 05-07, 2020 ISSN: 0277-786X eISSN: 1996-756X

Co-author:Huan Zhang, Xiaoli Xie, Shengli Chang, Jingyue Fang

First Author:Guangyi Xiao

Indexed by:Essay collection

Document Code:117631Q

Discipline:Engineering

First-Level Discipline:Electronic Science and Technology

Document Type:C

Volume:11763

ISSN No.:0277-786X

Translation or Not:no

Date of Publication:2021-07-25

Included Journals:SCI