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一种双层MEMS器件堆叠封装件及其生产方法

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  • Release time:2016-04-28

  • Disigner of the Invention:郭小伟, 郭丽花, 慕蔚, 李习周, 朱文辉

  • Type of Patent:Invent

  • State of Patent:Authorized patents

  • Authorization number:ZL201110455037.X

  • Service Invention or Not:no

  • Authorization Date:2015-10-07

  • First Author:朱文辉

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