Release time:2016-04-28
Affiliation of Participant(s):Tianshui Huatian Technology Co., LTD
Leading Scientist:朱文辉
Supported by:Ministry of Science and Technology of the People's Republic of China
Type of Project:极大规模集成电路制造技术及成套工艺(02专项)
Nature of Project:Development and research
Project Number:2011ZX02606
Date of Project Approval:2011-01-01
Scheduled completion time:2013-12-31
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